Copyright © 2011 Y. M. Chen et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
The homotopy analysis method (HAM) is employed to propose an approach for solving the nonlinear dynamical system of an electrostatically actuated micro-cantilever in MEMS. There are two relative merits of the presented HAM compared with some usual procedures of the HAM. First, a new auxiliary linear operator is constructed. This operator makes it unnecessary to eliminate any secular terms. Furthermore, all the deformation equations are purely linear. Numerical examples show the excellent agreement of the attained solutions with numerical ones. The respective effects of applied voltage, cubic nonlinear stiffness, gap distance, and squeeze film damping on vibration responses are analyzed detailedly.